SURFACE systems + technology GmbH & Co. KG
SURFACE nanometrology
SURFACE nanometrology News Ticker:
New: Market launch of our sm@rt 500 nanoindenter system. Small in design - big in performance.
SURFACE nanometrology News Ticker:
New: Micro controller controlled Humidity Controller for material science investigations
New: 200 mm automated vacuum chuck for the G200 nanoindenter allows measurement of the entire wafer surface under constant measurement conditions (frame stiffness)
SURFACE PLD Technology News Ticker:
New: Battery Workstation delivered to Cambridge University , GB. It combines three different physical coating processes with a glove box: PLD, sputtering, thermal evaporation and all on a single standard workstation system frame
New: Insitu- Beamline PLD System installed at Karlsruhe KIT allows unique thin film investigations in the synchrotron beam

Custom UHV Process Chambers

Evaporator module
Complex evaporator module

UHV Deposition and Analysis Chambers from SURFACE

SURFACE can provide a range of UHV deposition, analysis, and transfer chambers according to your needs. These can be stand-alone systems, or the chambers can be integrated into a cluster system based on the SURFACE Laser Star cluster design.

Examples of Installed SURFACE Custom Systems

  • Temperature-dependent surface wetting analysis chamber (Technion, Haifa)
  • Complex deposition/evaporator system connected to an existing ESCA/XPS (TU Darmstadt)
  • Sputter deposition and 4" wafer curvature stress measurement cluster (Cornell University, Ithaca)
  • Hydrogen plasma cleaning system for 4" Si wafers (Fernuniversität Hagen)
  • Ion beam sputtering of radioactive samples, sample film tape sealing system (RWTH Aachen)

Examples of other UHV systems built by SURFACE in connection with our Laser Star cluster:

  • Sputtering systems
  • Evaporator systems with several low- or high-temperature evaporation sources/effusion cells
  • e-Beam evaporators
  • Chambers for UHV-AFM and STM
  • Chambers for XPS/ESCA
  • Specialized transfer modules to hand over samples to additional systems by other manufacturers
  • Transfer tunnels to move samples between different systems

The SURFACE customized UHV modules are designed based on your requirements, so please contact us for more information.

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Saturday, 2020-09-26  10:15