SURFACE systems + technology GmbH & Co. KG
SURFACE nanometrology
SURFACE nanometrology News Ticker:
New: Market launch of our sm@rt 500 nanoindenter system. Small in design - big in performance.
SURFACE nanometrology News Ticker:
New: Micro controller controlled Humidity Controller for material science investigations
New: 200 mm automated vacuum chuck for the G200 nanoindenter allows measurement of the entire wafer surface under constant measurement conditions (frame stiffness)
SURFACE PLD Technology News Ticker:
New: Battery Workstation delivered to Cambridge University , GB. It combines three different physical coating processes with a glove box: PLD, sputtering, thermal evaporation and all on a single standard workstation system frame
New: Insitu- Beamline PLD System installed at Karlsruhe KIT allows unique thin film investigations in the synchrotron beam

Vacuum chuck for 200 mm wafer

Sample tray
Vacuum chuck
Click to enlarge

Click to play video

Key Features

  • Rotatable sample area 200 mm in diameter for full 8″ wafer
  • Motorized rotation by stepper motor and tooth belt
  • Top shower plate exchangable for different wafer thicknesses
  • Pumping, venting and locking are contolled by software
  • Complete setup with contoller, diaphragm pump and tubings
  • Fits to G200 Nanoindenter sample tray
  • Whole wafers can be measured without re-mounting


Sample tray
Vacuum chuck with controller and vacuum pump
Click to enlarge
Sample tray
Control software interface
Click to enlarge
  • Automated wafer tests
  • Quality control
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Thursday, 2024-07-18  10:48