SURFACE systems + technology GmbH & Co. KG
SURFACE nanometrology
SURFACE nanometrology News Ticker:
New: Market launch of our sm@rt 500 nanoindenter system. Small in design - big in performance.
SURFACE nanometrology News Ticker:
New: Micro controller controlled Humidity Controller for material science investigations
New: 200 mm automated vacuum chuck for the G200 nanoindenter allows measurement of the entire wafer surface under constant measurement conditions (frame stiffness)
SURFACE PLD Technology News Ticker:
New: Battery Workstation delivered to Cambridge University , GB. It combines three different physical coating processes with a glove box: PLD, sputtering, thermal evaporation and all on a single standard workstation system frame
New: Insitu- Beamline PLD System installed at Karlsruhe KIT allows unique thin film investigations in the synchrotron beam

Laser Sample Heating Technology for Scanning Electron Microscopy...

test

...installed at a ZEISS AURIGA compact

Excellent hardware integration

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  • only one free door flange is used
  • one compact laser optic with variable spot size
  • water cooled substrate holder protects the SEM stage
  • all detectors are possible
    • FIB
    • inlens BS
    • 2nd BS
    • EBSD
  • compact electronic box includes all necessary electronic
  • simple software control via TCP/IP
  • GUI controlled via SYNERGY from the SEM keybord/mouse


Substrate heating up to 1200°C at the AURIGA compact

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Internal laser beam line with vacuum flange
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  • Heating to 1000°C and above
  • High temperature dynamics
  • Adaptable to most SEM‘s
  • Highly flexible sample stage with flexible pre tilting angle
  • Minimized thermal effect to the SEM and ist different detectors









Simple but accurate substrate placement

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  • Pre tilted sample holder with variable angle for EBSD integration
  • Water cooled interconnection base
  • SURFACE laser heater substrate carrier plate with penetrating TC and laser cutted sample size structure for best temperature homogeneity
  • Laser optic is exactly coupled with the substrate position during sample motion
  • Optional bias capability to compensate the thermal electron effect to the contrast









Powerful user interface

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  • Windows based GUI with highly flexible access to all temperature control software features:
    • Constant temperature with variable ramp up speed from 0 - 1000°C/min
    • Cycling between two temperature level with variable ramp up speed and defined cycle numbers
    • Temperature control either by TC or pyrometer
    • Realtime graphs
    • Variable sample frequency of the temperature reading of up to 10 kHz
  • Integrated script language for high speed processes with max.ramp up speed of 500 °C/sec

















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Option: Fast cooling upgrade for AURIGA laser heater

Laser flange

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  • laser head with two light fiber and spot position adjustment
  • separate TC feedthrough
  • optional grid potential feedthrough

Cooling flange

  • pneumatical interface with adjustable pressure for variable contact force
  • water cooling
  • optional lN2 cooling



















Software controlled cooling cycle

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  • variable cooling speed from 0,1 - >100°C/sec*)
  • medium temperature for isothermal treatment
  • separate annealing steps
  • extreme application
    • cooling down to -100°C










Sample tray
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Sample tray
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Saturday, 2026-03-14  12:25