SURFACE systems + technology GmbH & Co. KG
SURFACE nanometrology
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Custom UHV Process Chambers

Evaporator module
Complex evaporator module

UHV Deposition and Analysis Chambers from SURFACE

SURFACE can provide a range of UHV deposition, analysis, and transfer chambers according to your needs. These can be stand-alone systems, or the chambers can be integrated into a cluster system based on the SURFACE Laser Star cluster design.

Examples of Installed SURFACE Custom Systems

  • Temperature-dependent surface wetting analysis chamber (Technion, Haifa)
  • Complex deposition/evaporator system connected to an existing ESCA/XPS (TU Darmstadt)
  • Sputter deposition and 4" wafer curvature stress measurement cluster (Cornell University, Ithaca)
  • Hydrogen plasma cleaning system for 4" Si wafers (Fernuniversität Hagen)
  • Ion beam sputtering of radioactive samples, sample film tape sealing system (RWTH Aachen)

Examples of other UHV systems built by SURFACE in connection with our Laser Star cluster:

  • Sputtering systems
  • Evaporator systems with several low- or high-temperature evaporation sources/effusion cells
  • e-Beam evaporators
  • Chambers for UHV-AFM and STM
  • Chambers for XPS/ESCA
  • Specialized transfer modules to hand over samples to additional systems by other manufacturers
  • Transfer tunnels to move samples between different systems

The SURFACE customized UHV modules are designed based on your requirements, so please contact us for more information.

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Saturday, 2017-12-16  19:25