PLD Systems

   PLD Workstation

   Laser MBE cluster tool systems

   Large Area PLD systems

   Plume-Master control software

 PLD components:

   Heater manipulators

   Target manipulators

   Laser heater

   High pressure RHEED systems

PLD-Workstation

the compact pulsed laser deposition system

SURFACE has integrated all necessary components of a PLD system into
one rack. This simple task offers the customer the most flexible use of the
system, free of a lot of hardware installation management efforts.
This is the reason for an unbeatable flexibility and opens the usage of PLD
for users with no experiences of this technology.
Especially for advanced oxide layers the PLD- Workstation is the excellent
prototyping system. Using the major advantage of PLD - the stoechiometrical
correctness of the material transfer from a target to the substrate.
The PLD-Workstation delivers advanced deposition technology in a powerful
and compact tool - usable for a wide range of applications. With all the
built in flexibility - the security always has first priority:
- totally sealed laser beam line with external actuated mirror adjustments,
- laser and the laser gas cabinet are permanently connected to an
external exhaust blower
The vacuum chamber is designed for research. For this reason it already
has spare flanges available for the most common in situ process analytical
tools:
- optical analysis technologies: OES or FTIR
- RHEED
- mass spectroscopy
- additional deposition or plasma or gas sources
Two windows allow the additional visible contact to the process from two
different angles and two sides. The big front door gives total access to the
major process components: target and substrate manipulator. The
standard configuration is a 2“ substrate heater and a 4x2“ indexed target
manipulator.
Heaters of 1“ or 3“ are optional available.
All SURACE PLD systems have a high automation level to control the full
process and this makes the usage of the system very easy. The software is
based on Windows XPpro and the application is programmed with LabView
8. The process program is structured as a number of process steps with
individual settings. Intuitive process graphics high flexible data logging with
data export and self-test capability are additional features.