PLD Systems
PLD Workstation
Laser MBE cluster tool systems
Large Area PLD systems
Plume-Master control software
PLD components:
Heater manipulators
Target manipulators
Laser heater
High pressure RHEED systems
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Transferable targets and
target assemblies are one of the key features of all SURFACE PLD systems.
Only this procedure allows high throughput and the powerful use of UHV
technology.
Furthermore, for Large Area Deposition it is important and
necessary to manipulate target and substrate simultaniously to be able to
deposit films with an acceptable thickness homogenity. This complex motion
is always computer controlled and can be varied to modify the process.
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Advanced target assembly
for Large Area Deposition. Four 2" targets with permanent rotation and 5
axis computor controlled motion to control the plume position.
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Assembly for five 1"
targets with permanent rotation of the actual target and target toggle.
The same configuration will be delivered also with four 2" targets.
The Targets are protected against cross contamination and radiated heat of
the substrate surface. This heat shield assembly is not shown.
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©by SURFACE 2001
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