PLD Systems
PLD Workstation
Laser MBE cluster tool systems
Large Area PLD systems
Plume-Master control software
PLD components:
Heater manipulators
Target manipulators
Laser heater
High pressure RHEED systems
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UHV Laser Star MBE module
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The Laser Star PLD module is a complete UHV based PLD system with
all necessary components in a compact design. The free standing
process-/load lock chamber combination allows an easy access to all
process components. For the PLD process a powerful 1000°C substrate
heater works together with a 5x1” target manipulator. These targets
are placed in a transferable carousel. This allows a UHV conform
handling of the targets. In the load lock chamber a cassette holds up
to 5 samples and two target carousels.
The chamber includes pre configured flanges for additional sputter-,
gas- or plasma sources. RHEED flanges are also included as well as up
to three windows. The transfer of the substrate is camera supported –
the user can watch his transfer process on a 15” TFT monitor above the
chamber.
The excimer laser is placed on top of the combined control/laser gas
cabinet. A fully sealed beam line connect the laser with the vacuum
chamber.
All SURACE PLD systems have a high automation level to control the
full process and this makes the usage of the system very easy. The
software is based on Windows XPpro and the application is
programmed with LabView 8. The process program is structured as a
number of process steps with individual settings. Intuitive process
graphics high flexible data logging with data export and self-test
capability are additional features.
Laser Star Cluster Tool System
a flexible multi
chamber
UHV system
for
advanced material science
Based on an advanced modular concept, the Laser Star Cluster Tool system offers
an highly flexible system for material science applications. It can start with a single
PLD chamber with a load lock and can be upgraded later to a multi chamber cluster
tool system with different process and analytical chambers.
The Laser Star system incorporates your own
different technologies into
one powerful new
system
with up to five or seven
individual
chambers,
advanced processing without
venting the substrate will be
possible.
This cluster tool system
grows with your
knowledge
and your needs and is able
to combine process or
analytical systems from
different suppliers. The
transfer interface of
such
tool can be adapted to the
SURFACE one. Such
combination enables the
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(click on image to enlarge)
Laser Star Laser MBE with two additional
evaporation
chambers, a UHV AFM/STM and a UHV transport
chamber.
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user to set up small multi step processes without venting the substrate.
 
UHV central transfer chamber and different modules
UHV central transfer chamber
The handling chamber is the heart of the system and highly flexible to adapt
different modules. It includes a IGP/TSP pump stage and a standard load lock
chamber with turbo-drag pump stage.
This central chamber has a base pressure in the low 10-10 torr scale and is mounted
on a solid steel frame with up to eight docking flanges for the additional chambers.
It includes also the bake out heating components, a 12 kW heater with central
circulation fan.
 
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