Unbenanntes Dokument Friday, 25.07.2008  08:42

 

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Unbenanntes Dokument

 

Lateral Force Module

ScratchMTS

The scratch testing is and option for the high load head of the Nano Indenter XP. The lateral forces are sensed by the deflection of the indenter shank under lateral forces.

CSM - Options

CSM2

The Continuous Stiffness Method (CSM) allows to monitor the stiffness of the contact between indenter and surface during the holding cycle. Since the Force and the total displacement of the indenter are also known at each point of the loading curve a quasi-continuous plot of hardness and modulus vs. depth can be recorded. The strength of the method allows also to independently sense the contact area during the whole test when assuming a constant modulus vs. depth which makes it a powerful tool for creep investigations over long periods.

Vacuum Chuck

Chuck2

The wafer chuck is the standard sample holder on the Nano Indenter XPW

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